The Design And The Applications Of The Inertial Impact Linear Motor

With the progress and development of science and technology, many fields demand higher requirements of precision driving and positioning, not only higher resolution, and also enough output force and larger output stiffness, traditional drives can’t meet these requirements. Piezoelectric actuator basing on piezoelectric materials has the advantages of inertia small, fast response and high resolution, can meet the requirements of miniaturization and micromation of drive components. This topic use the piezoelectric materials as a driving element, design 2 sets of piezoelectric actuator for the use of precision focusing for microscope objective lens. The first device use rotary ultrasonic motor as the power source, driving the objective to complete the function of precision positioning, so it can realize the purpose of precision focusing for microscope. The second device use piezoelectric stack as the driving source, driving the microscope objective lens to complete the function of precision positioning. Process and manufacture prototype respectively and carry out the relevant experimental study. The main research contents and results are as follows:1. This paper introduces the concept of piezoelectric actuators, review the classification and applications of piezoelectric actuators, introduce the characteristics and application research of the traveling wave rotary ultrasonic motor and inertial impact motor.2. Introduce the properties and parameters of piezoelectric materials, discusses the structure, basic characteristics and attention in use of the piezoelectric stack.3. Put forward the design scheme of precision focusing device using TRUM-30 traveling wave rotary ultrasonic motor as driving source. Design the structure and size of each institution, carry on the finite element analysis of flexible mechanism according to the design requirements. Process and manufacture prototype and do experiment, do experimental study in view of the key performance indicators of the focusing device, such as displacement resolution and working performance. The experimental results show that the precision focusing device has stable performance, can achieve a two-way adjustment of the microscope objective lens, and its focusing accuracy can be achieved to 15 microns.4. Basing on the inertial impact theory, put forward the design scheme of the inertial impact linear motor using piezoelectric stack as driving source. Select the type and model of the piezoelectric stack, design the structure of each institution. Process and manufacture prototype and do experiment, do experimental study in view of the key performance indicators of the motor, such as displacement resolution and performance stability. The experimental results show that the inertial impact type linear motor work smoothly, has uniform step, can achieve a two-way adjustment of the microscope objective lens, its displacement resolution can reach to 2 microns.