Research On Region Selective Polishing Of Liquid Constrained Micro Atmospheric Pressure Plasma

With the application of the micro-structure is more and more widely, people have put forward higher requirement for the ultra-smooth surface with high efficiency. However, the traditional mechanical polishing can damage the surface of the work piece on one side, the surface quality cannot meet the requirement either. Atmospheric pressure plasma polishing use the plasma and chemical reaction to remove thr materials on the workpiece, reduce the roughness value, moreover surface materials can keep their intrinsical properties. In theory, it is the effective means to solve the micro-surface’ manufacturing with high efficiency.Atmosphere pressure plasma have low resolution in processing, because of the spatial diffusion of plasma, the processing scope is about 4~5 times of the plasma torch diameter, and the surface shape accuracy is low. Therefor we proposed a new processing method that we put a layer of liquid membrane on the surface, the plasma only “blow away” the liquid and then it can touch the surface. We use the liquid constraints to achieve the regional selective processing.Based on the theory of the liquid constricts, we improved the plasma generator on the basis of the original system, and we simulated the multiphase flow field, proved the feasibility of the proposed processing method in theory. We choosed different liquid to constraints the plasma, there are two methods based on physics and chemistry, respectively. Then we used these two methods to do experiments, and observe the result of experiment, analyzes the feasibility of the two ways.Through the experiments, we found the fluid wax can realize regional processing, and analyzed the surface type curve with the constraint of the liquid wax. Then we verified the controllability of the experiment, analyzed different process parameters on it and the changing rule of the remove. At last we illustrated the shape quality with liquid wax.On the basis of a large number of experiments, we choosed the inert gas flow rate, processing power and constraint diameter as the process parameters to design the experiments, then dealed with the results, established the model of removal function, used the mathematics software fitting out its relationship with three parameters. We did more experiments to validate the model, as the result, the fitting function of expression can be accurately predicted the description of the results.