Research On The Dynamics Modeling And The Trajectory Planning Of A Large-scale Motion Macro/Micro Manipulator

With the development of MEMS and the advanced manufacturing technology, micromanipulation and microassembly tasks has become a multidisciplinary research topic. However, a macro-scale motion is required in a lot of micromanipulation and microassembly tasks. Thus, the elastic vibration of the microgripper may occur during and after the motion due to the flexure-based structure in the system. It will affect the reliability and positioning accuracy of the gripping process.The background of the thesis is the motion control and vibration suppression technology in microgripping process. In particular, a macro/micro manipulator composed of a servo motor, a mechanical arm and a compliant microgripper was focused. Moreover, the motor drives the arm and the microgripper rotating macroly. The microgripper finishes the pick-and-place micromanipulation. The dynamic characteristic, vibration suppression principle, trajectory planning and optimal algorithm application for the rigid-flexible-coupling manipulator were studied. In addition, an experimental system was set up. Combing with the theoretical analysis, number simulation and experimental verification, the vibration suppression for the microgripper with flexure-based structure was acquired. Its gripping reliability, positioning accuracy and operation efficiency of the system was improved.Based on the above manipulator, the dynamic equations of it was established through Lagrange equation. Then, the vibration of the microgripper was simulated when the manipulator tracking trajectories of the trapezoidal and the five polynomial. The numerical simulation results were deeply analyzed. Afterwards, the importance of trajectory planning and the validity of the systematic dynamic model were demonstrated.On the basis of the dynamic equations and the simulation results, the trajectory planning principle for vibration suppression of the microgriper was analyzed. An optimization index regards the equivalent excitation torque of the flexible part of the manipulator was proposed. Moreover, the reference curve and the interpolation curve using the five polynomial trajectories were adopted. The vibration suppression trajectory was obtained using the genetic algorithm and the optimal results were verified by the numerical simulation. To solve the trajectory planning for suppressing the forced vibration, a 5-2-5 trajectory based on the trapezoidal and the five polynomial trajectories was proposed. The effectiveness of the optimal trajectory was also proved through the numerical simulation compared with the vibration suppression trajectory.Finally, an experimental system for the manipulator was set up. The vibration of the microgripper when the manipulator was driven by different trajectories was experimentally measured. Experimental results verified the effectiveness of the theoretical analysis and the trajectory planning.