Experimental Research On Force-Electricity Coupling Micro/nanoindentation Using Piezoelectric Ceramic Materials

Piezoelectric material as a typical multi-physical field coupling material has been widely used in industrial production and daily life. With the development of intelligent electromechanical technology and nanoscale motor, more and more attention has been paid on the piezoelectric material with excellent multi physical field coupling performance. A large number of theoretical and experimental studies have been carried out on the mechanical and electrical properties of the materials under the multi-physics field. Multi-physical field coupling micro and nanoindentation testing response of piezoelectric material have important significance on mechanical properties and electrical properties, and it’s necessary basis on a quantitative analysis of pressure electric material constants.According to the actual needs of micro and nanoindentation testing technology in the test application of multi-physical field coupling material performance, this paper mainly conducted the mechanical electrical coupling test. Based on the mechanical response and electrical responses indentation in the two types of tests on typical piezoelectric ceramic materials in the electromechanical coupling micro and nano indentation test, this paper studies the transverse isotropic piezoelectric material and piezoelectric quartz crystal slice coupled mechanical and electrical response.On the basis of the analysis of micro nano indentation test, especially the development of multi physics field coupling micro nano indentation response field at home and abroad in this paper, the writer built a force electric coupling micro and nanoindentation testing system.This paper mainly study on the indentation response of piezoelec-tric ceramic materials and quartz wafer under the condition of force electric coupling condition. Firstly, the indentation analysis theory of piezoelectric ceramic under force electric coupling condition has been analyzed in this paper. Combined with the test content and relevant test parameters, sorting out the theoretical formula of response based on the micro and nanoindentation theory and piezoelectric effect theory of the electrical and mechanical response. Boundary conditions defined in accordance with the test conditions, the indentation force electrically coupled constitutive equation is sorted out in combination with the contact condition and the electrical condition.In this paper, the PZT piezoelectric ceramic coupling micro and nano indentation is studied in variational range of electrical condition. The effect of electric field on the indentation response of piezoelectric ceramic materials has been studied. The control mode of micro and nanoindentation force is considered. The writer selected 4 different load control parameters. Selecting a load control value,this paper conducted the variational the force electric coupling field micro and nano indentation experiments. By changing the conditions of the external electric field( U=0V-200V), the writer horizontally and vertically contrasted the effect of force electrically coupled micro and nanoindentation experiments on the the indentation load and indentation depth curves and basic mechanical parameters,and the effect of force electric coupling field on the influencing trend of mechanical property parameters. The writer using Olympus optical microscope to observe the indentation morphology of PZT piezoelectric ceramic.By comparison of indentation morphology under the variational external electric field,summarized the effect of output electric coupling field on the performance of PZT piezoelectric ceramicsAt the same time, this paper has carried out the experimental study of piezoelectric quartz crystal thin slice force of electric coupling micro and nano indentation experiment. Whole experiment with fixed external electric field condition, the micro and nanoindentation experiment control mode as variables, the mechanical and electrical coupling field whether indentation mechanical parameters of quartz crystal slice, and quartz crystal slice of electrical performance parameters in the electromechanical coupled micro nanoindentation experiments to change the trend and influence factors.