Ultrasonic motor is a new actuator. The ultrasonic motor which can achieve two forms of rotary and linear motion at the same time, is a hot spot on research areas of ultrasonic motors in recent years. Since the ultrasonic motor has many advantages, such as diversified forms, simple structure, easy to operate, etc. It is easier to realize the motion forms of rotation and linearity more than traditional electromagnetic motors. So this kind of ultrasonic motor has attracted the attention of scholars from different countries. and it has broad market prospects.In this paper, referencing to a large number of domestic and foreign related literature, a new type of rotary-linear ultrasonic motor which be based on the principle of rotation of conventional driving traveling and in-plane bending nut-type ultrasonic motor is presented. The cylindrical surface of the vibrator is in contact with the rotor in the form of screw threads. The friction between the screw thread drives the rotor move. The vibrator with double teeth can maintain better modal, make the movement even more uniform and increase the amplitude, thereby increasing the motor output torque.Working principle of new type of rotary-linear ultrasonic motor is analyzed theoretically. The realization of rotary-linear motion and the structure of vibrator are designed. Dynamic design on vibrator is studied by using finite element analysis software. The working mode and frequency of the vibrator are found through modal analysis, and the structure of the vibrator is determined. Meanwhile, all the main parameters affecting the structural dimensions of the vibrator and the natural frequency of the modal are analyzed systematically. A prototype is manufactured. Conducting experiments on prototype, the results show, on the condition of exciting voltage 210 V and working frequency 26852 Hz, the maximum unloaded speed of the motor can attain 94r/min, the maximum axial driving force is 53 g, and the output-torque can attain 0.255N·m. |