The Research Of Precision Motion Sliding Table Structure And Motion Control

In the drive mode of the linear motion, linear motor has higher efficiency, higher machining precision and longer life and other advantages than traditional rotary motor. Linear motor has been widely used in many fields, such as precision instrument, medical equipment, semiconductor processing and so on. But when the linear motor drive platform is used as the vertical axis, it is necessary to consider the influence of gravity.A three axis precision motion sliding table driven by linear motor was designed in this dissertation, and the article is focus on studying the precision sliding table’s mechanical structure and linear motion control problem. Research shows that the gravity balance system response speed and positioning precision and other dynamic performance are the keys of the design. Gravity of precision motion slide vertical direction was considered, and a structure for balancing the gravity effect was designed in this dissertation, then studied for the rapid response performance and positioning accuracy problems of the balance structure.First of all, based on analysis of three axis precision motion platform overall design scheme, selection and configuration of some components were presented, such as linear motors, control components, linear guides and so on, and non-standard parts’ structure was designed, then processed and assembled a three axis precision motion platform based on linear motor drive.Secondly, the design of the three axis precision motion platform control system was given, including the selection and adjustment of the controller and linear motor driver, the control system can effectively control the positioning accuracy of the precision motion platform.Again, the 3D model of precision motion sliding table was established in the Pro/E, and have been imported into the ADAMS software for the dynamic simulation, and analyzed the influence of balance damping for the balance device. A direct drive three axis precision sliding table vertical movement of gravity balance device was designed, and the balancing device can improve the positioning precision of the moving slides of vertical movement.Finally, the positioning accuracy of the precise sliding table which install gravity balance device was tested. Measures the positioning accuracy and precision of repeated positioning were measured by using laser interferometer, and through PMAC error compensation control repeated to enhance the positioning accuracy, that proved the balance device can meet the application requirements. In addition, current loop response curves before and after installation of gravity balance device show that the gravity balance device can effectively ensure the stability of the vertical movement.