Study On The Key Technology Of The Integrated Michelson Interferometer Based On Polarized Light

In recent years, with the continuous development of science and technology, precision machinery, production of integrated circuits and many other precision machining industries both have a high requirement for precision measurement. Therefore, studying the key technology of test system will helpful to understand the precision. In this paper, the key technology of homodyne laser interferometer is studied. The main content of this paper is as follows:First of all, the principle and method of homodyne interferometer are expounded according to the principle of Michelson interference. Secondly, the mathematical model of orthogonal polarization laser interferometer is discussed based on Jones matrix theory. Thirdly, the whole light interference principle is analyzed in detail.Homodyne interferometer system including light path and circuit is designed. Photoelectric conversion circuit is designed using the photocell BPW34. The influence of environmental factors on the measurement signal is reduced by symmetrical arrangement of photoelectric detector position. There are quadrature phase shift error, unequal amplitude error and zero offsets error, which are introduced. In addition, the system error was modified by Lab VIEW, using error correction methods based on Heydeman model.The interference signal of the system output is tested, indicating this system can achieve the desired effect. The system error is analyzed from the light path, circuit and external environment.