Optimal Design Of The Probe For Micro-Nano-CMMS

Touch probe is one of the main components of the micro/nano CMM, it can be classified trigger probe and scanning probe.The development status of micro/nano 3D probe at home and abroad was introduced briefly, a high sensitivity touch trigger and scanning probe have been designed. The principles and the structures of the two probe were introduced in detail. Both the two probes are composed of a elastic mechanism, a 3D optical sensor and adjusting mechanism. The elastic structure are divided in single and double reed structure, and the stiffness have been modeled respectively, structure has been optimized and the proper parameters have been obtained, the optimized designs have been testified by Solidworks simulation and practical experiments. Optical sensor based on the principle of auto -collimation and atomic force microscope (AFM), the sensitivity model were analyzed, structural parameters has been optimized. Adjusting the mechanism and displacement can be measured in 3D. Two probes include simple structure in mechanism structure and sensor, low cost and easy assembled.Experimental systems based on PI (Physical Instrument) micro platform have been built to test the stiffness of the two elastic mechanisms, repeatability, resolution, range and stability of the two probe. The experimental results demonstrate that the stiffness of the two elastic mechanism both are 0.7 mN/μm in horizontal and vertical and approximately equal in 3D, and simulation results testified double layer structure is the double of the single layer; the trigger point repeatability of the trigger probe is 15 nm, the minimum resolution is less than 3 nm. The touch point of the scanning probe repeatability is within 12 nm; the minimum resolution is less than 4 nm in vertical direction. Therefore the two types of probe can be used in micro/nano CMM.