Strengthened T2 Copper Micro Flat Springs Fabricated By Precision Etching And Its Properties

Along with the technology of MEMS is used in all walks of life, the market scale of MEMS is expanding with an unbelievable speed. Micro electro mechanical system is the combination of various micro parts, so the key to develop MEMS is the technology of micro parts forming. As the significance mechanical structure, micro flat spring provide elastic force and transfer energy, which is the same as normal one. In this paper, the material is commercially T2 copper, the mechanical property of rolling treatment at room temperature was discussed, the preparation is precision etching, and forming state, the forming quality and properties of micro flat spring varied with forming processes. The main conclusions are as follows:In the tensile test at room temperature, the T2 copper exist the grain size effect and feature size effect on the tensile yield strength.Micro flat springs of T2 copper with 0.10mm,0.15mm,0.20mm of thickness,0.50 mm of line width were manufactured by precision etching. Thickness makes a great difference on the line width accuracy of micro flat spring. Thin thickness can make micro flat spring have good shape and high line width accuracy. Fine grain can make small roughness of micro flat spring.With the increase of rolling reduction ratio and temperature, the circulation service life of micro flat spring decreases and then increases; with the increase of the thickness, the circulation service life of micro flat spring increases. The circulation service life of micro flat spring that forming by T2 copper is up to 299 with the highest. That is much better than the Ni micro flat spring which prepared by LIGA.