| With the development of latest nano-fabrication technology,anano-positioning stage which can be generally used for nano-fabrication,nano-metrology and nano-assembly is needed. Nano-positioning stage with large scaleã€high precision and small size have aroused great interest among researchers in recent years. As the drive part of nano-positioning stage,the driving stability and plane precision of permanent magnet linear motor are important factors for the nano-positioning stage.The purpose of this paper is to optimize the performance of the linear motor by improving the air gap magnetic field of the permanent magnet array and the plane precision of the planar coils. Firstly,study on the permanent magnet array of the linear motor,use the permanent magnet block of the convex section to form the permanent magnet array,and do the theoretical analysis and the finite element simulation to verify the improvement. According to the requirements of the subject,optimized the size of magnetic block and assembled the HALBACH permanent magnet array. And then,study on the planar coil of the linear motor,made the planar coil with single layer way which could improve the utilization of the raw materials. Using the finite method to analyze the electromagnetic force of the coil,and according the actual needs,selected the appropriate size of the coil. Manufacturing the planar coil with wire-electrode cutting way and assembling them,improved the planeness of the coil and simplified the production process of the coil. Moreover,study on the driving mode of the linear motor,avoiding the mutual influence between the coils by the way of the independent drive of each phase. According to the practical requirements,selected appropriate magnetic coupling chip,digital analog conversion chip and power amplifier chip and designed the driving circuit and made the driving circuit board. Lastly,built the whole system of the linear motor and carried the simulation and experiment... |
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