Optimization And Design Of Precision Optical Glass Plate Instrumentation Isolation System

With the continuous progress of science and technology, The accuracy of precision machining equipment and precision measuring instrument is gradually improving.The influence of the vibration disturbance from the environment on the precision of the precision instrument can not be ignored. The vibration isolation technology of the precision measuring instrument has become an important subject in the field of scientific research and engineering application. In order to meet the vibration control requirements for precision instruments, we need using different vibration isolation system for different devices, to achieve more excellent vibration isolation effect, making precision instruments are able to obtain a stable working environment.In this paper for a high precision large flat panel displays the automatic optical detection instrument machine vibration isolation system, and puts forward the double-layer vibration isolation scheme is systematically studied double-layer vibration isolation system on the basis of the theory, based on automated optical inspection instrument flat panel displays the vibration isolation system is designed. The main research contents include:For double-layer vibration isolation system in this paper, we use the four-terminal parameters method to have theoretical modeling analysis, established the four-terminal network parameter vector model. Based on the principle of vibration isolation, established double vibration isolation system model of precision optical instrumentation in Adams, analyzed the impact of single-layer vibration isolation system and double-layer vibration isolation system for instrument equipment vibration isolation; and studied the impacts of other factors in double-layer vibration isolation system, such as the installation location of isolator, isolator stiffness, foundation plate thickness, isolator shape,and quality ratio of intermediate mass and upper mechanical equipment.On the basis of theoretical research, the vibration isolation system of the principle prototype of automatic optical inspection instrument for flat panel display is optimized. After the development of the flat panel display automatic optical detection equipment prototype test, which can meet the expected requirements of vibration isolation.In this paper, the parameters optimization and design of the double-layer isolation system has a certain reference value for the design of vibration isolation system of large scale precision measuring instruments.