Pull-in Phenomenon Analysis Of The Perforated-plate Electrostatic Micro-actuator

As a core part of micro mechanical system, micro actuator not only can provide power formicro mechanical system, but also can become micro mechanical system operation and executionunits. Among them, the electrostatic micro actuator is one of the most common micro and the mostwidely used actuators. In the micro device dimensions, the damping effect is obvious, the smallerdevice size is, the greater the damping effect would be, this feature has been seriously affecting theefficiency of the micro device. Of course, we can design the vacuum packaging process, but due tothe wide applications of the micro device and direct interaction with the outside world on variousoccasions, in this case, the design concept of the perforated-plate is proposed. The perforated-platecan effectively reduce the damping effect, therefore, it is necessary to research pull-in parameters ofthe perforated-plate on the basis of research results of the large parallel plates on pull-inphenomenon.This paper introduces related research development background and the pull-in phenomenon ofthe parallel-plate electrostatic micro-actuators. On the basis of the existing theories of parallel-platemodel, we research the perforated plate model. The pull-in instability parameter of this paper isderived by force method and energy method respectively when ignoring the edge effect model ofperforated plate in the electrostatic field force, and then leak capacitor simplified model is derivedwith energy method, the detailed leakage capacity model of static Pull-in buckling equations. Usingthe software MATLAB and ANSYS finite element simulation, and comparing the three models ofthe pull-in instability parameter data, a relatively accurate model of the pull-in parameter can beobtained. Taking step signal and modulation signal as an example, the three models under theperforated plate dynamic pull-in phenomenon are analyzed, then the corresponding dynamic pull-inparameter equation can be deduced, and also using the software MATLAB and ANSYS simulation,the pull-in parameters, the device size effect and the damping coefficient are emphatically analyzedwhen using the step signal. Through various analysis, the different size of perforated plate canalways get the most applicable module.