Development Of Wafer Level Thermopile Detector Test Batch System

MEMS thermopile infrared detector is widely used in consumer electronics,medical care, smart building, automotive industry and other fields with dramaticallyincreasing demand. Therefore, how to reduce the production cost of the device andincrease market shares, is becoming the most concerned problem of the devicemanufacturers. Currently, the testing costs of MEMS thermopile infrared detectoraccount for more than half of its total costs. Due to the limitations of the currenttesting technology and equipment, the testing devices are completed individually byhand, and as a result the production costs are limited. In response to the industryrequirements, developing a batch automatic testing system of thermopile detectorshas a clear market value. In this paper, we build on a batch-chip test system forinfrared thermopile devices special test requirements by focusing on the operatingcharacteristic of thermopile infrared detector, especially the influence of ambienttemperature and incentive temperature.Firstly, this paper introduces the background, current domestic andinternational situation of the thermopile infrared detector. As well as the currentdomestic and international development status of the thermopile infrared detectorwafer-level test equipment.Secondly, based on the working principle of the device, we analyze the mainmethods and testing conditions of the device and design a batch wafer-level testequipment combined with wafer-level MEMS device testing requirements..According to the testing needs, we make workflow and performance indicators, andsolve the main problems arise in the design process through experiments andsimulation. The system structure is three dimensionally simulated by the SolidworksSoftware platform.Finally, the system is built and the property is tested. The system is composedof the motion control module, temperature control module and signal acquisition module and assembled by them with the modular design concept, in order toimprove the flexibility and scalability of the system. The system performance isverified by a section of a thermopile infrared detector. The results show that thesystem is accurate and credible.