3D Visualization Telenano Operation System In SEM

Due to the distinct phenomenon and character of operating a nanoscale object within a nano-object oriented system, the flexibility, reliability, and efficiency of the OS are being set higher request. A vision and virtual force feedback based 3D visualization master-slave telenano operation system is established combined with SEM visual assistance, haptic device and virtual reality technology. Non-idealities in operating space are analyzed to further improve the overall procedure and control method.A VR based scene is built to enhance the operator’s presence, where the virtual objects are modeled and the collision detection and force rendering among the objects are analyzed to complete the haptic presence subsystem.The haptic interaction system composed of operator, haptic device and virtual environment is modeled applying two-port network theory and the system stability is judged based on Llewellyn absolutely stable criteria. The virtual coupling(VC) is introduced to eliminate the unstable factors brought by virtual environment, and the performance of the system with VC is evaluated using impedance width theory.The update for virtual scene as well as the adjustment of virtual models is realized according to the object’s plan parameters extracted from image applying edge detection algorithm and Hough line transform. For closed loop control of operation tool, a depth information extraction method based on ROI is introduced, and the assess function of an image is format to focus substrate plan to determine the touching relationship between the probe and the substrate.Finally, an experimental platform is established. A nano material pushing experiment is carried out on the 3D virtualization interaction telenano-operation platform combined with vision and virtual force feedback, and the experimental results are also analyzed.