Analysis On Coupling Error And Design On Controller On Short-stroke Reticle Stage Of Lithography Machine

The manufacture of the lithography machine base on a country’s strong technological strength and industrial development. The research and development of the lithography machine involves the cross cooperation of several subjects.. The precision movement of mask template is realized in the work of the mask.. Whether the accuracy of the motion control of the mask table can be continuously enhanced can further improve the performance of the optical technology.. The control mode of macro motion and micro motion is used in the mask platform, while the micro motion platform directly reflects the control precision of the mask.. In order to realize the high precision servo motion of micro platform, this paper mainly has the following research contents..In this paper, the current situation of the development of the machine, the sliding mode control theory and the technology of the particle swarm optimization are introduced.In this paper, the operating principle of the machine, the mask table and the micro stage, and the error and the control system are realized.Secondly, the mask micro platform is equipped with 6 voice coil motor and 6 Holzer sensor. According to the motor installation position, completed the motor mechanical decoupling, subsequently for process control in center of mass and the center of exposure offset, the offset of center of mass estimation analysis method, the correctness and validity of this method has been verified by the experimental and measuring element in the actual installation based on the geometry of the, completed the measurement of the coupled model.Again, to mask against parameter perturbation building of anti disturbance of the work requirements, the use of sliding mode controller based on exponential approach. At the same time, the application of particle group learning algorithm, particle swarm optimization algorithm design of sliding mode controller parameters, and verified by the experiment. The effect of the choice of sliding mode parameters and the effect of the selection of the object function on the motion effect are discussed..Finally, on the basis of the above research contents, decoupling and single degree of freedom controller design, completed the mechanical coupling and platform model of six degree of freedom MIOM sliding mode control system design based on. On the basis of the simulation experiments, the importance of the coupling matrix calculation and the controller design for the accuracy of the multi DOF system is discussed.