| In a hot cathode electron gun, loading a certain voltage on both ends of the cathode can produce activate electron, which electron can be accelerated to high speed at the high pressure of the electronic form in the interelectrode of the cathode and the anode in the accelerating field, the accelerated electrons has the very high energy density of the electron flow in a vacuum environment under the action of magnetic field. The high energy density of the electron flow is called electron beam or electronic note.Electronic beam plays a vital role in the scanning electron microscope, the picture tube, the high power microwave tube, accelerator, and so on. In the study of new type of terahertz radiation source, we found that the movement of electron injection can produce a certain frequency of electromagnetic radiation or stimulate the corresponding physical phenomena, the stimulated radiation generated by the electromagnetic wave frequency, power and electronic injection beam parameters such as beam spot has a certain relationship, therefore the measurement of electron beam spot injection beam parameters becomes an important task in the study of new type of terahertz radiation source.Electron beam injection beam spot parameter measurement is a big topic, after the end of the previous and some accumulation formed there are some precise method for measuring the parameters of the electron beam. And according to the different types of electron beam there is a corresponding measurement method. In the study of new type of terahertz radiation source, according to the project we need to use the convergent Pierce gun and produced by electron beam injection in micro scales. As a result, the scale of measurement of micro-nano electron beam parameters is the key of the project research.This topic is about the ectronic beam spot injection parameters measurement, on the basis of the new terahertz radiation sources used in the study to the electron beam measurement, we proposed two methods for measuring the parameters of small size electron beam, the division of the two methods of measuring is mainly depending on the electron injection current magnitude. In view of this kind of situation, we put forward two methods in view of the scanning electron microscope(SEM) and high vacuum dynamic system in different electronic injection beam produced by the electron gun beam spot parameter measurement. According to the results of test and measurement, then combined with the calculation results of simulation software for contrast, scientific analysis of scanning electron microscope(SEM) and electron beam spot size injection in high vacuum dynamic system of related factors. And based on this test and measurement methods for laboratory subsequent terahertz wave radiation source of exploratory research, experiment on concrete is based on the combination of electronics and optics experiment research THZ wave radiation source. |