Motion Parameter Optimization Based On Model Identification And Dynamic Response Equivalent

With the development of micro electronic technology, high precision, high speed and high acceleration has become the target of modern microelectronic processing. To meet the high speed, high accuracy of the processing performance requirements of the motion platform, only to optimize the mechanical structure is not enough, it is necessary to improve the control technology, improve the driving performance is also imminent. This project to meet the performance of motion platform with high speed and high precision requirements。Based on model identification and dynamic response, an optimal method of motion parameters is proposed. This method will be used to improve the accuracy of the moving platform, reduce the positioning time and reduce the vibration of the platform.Analysis of common motion control system in this paper. Motion scheme using semi closed loop and position control. Selected Han’s linear motor platform, Han’s servo drives and Ni pxi-7350 motion control card to build the motion control system,established the research object.Linear motion platform is a platform for the interaction of multi components,In motion, the vibration of each component will have an impact on the movement and positioning of the platform, so that the positioning accuracy is difficult to improve;Therefore, this paper analyzes the dynamic response of the linear motion platform,Study on the motor platform existing in the movement mode of different orders of response,Multi modal response of the platform is isolated,And study the relationship between the components of the modal response,The equivalent simplified model of the moving platform is established.For the parameter identification model, through experimental modal testing obtained the equivalent model of the actual frequency. Taking into account the platform at the end of the movement, the resulting free vibration, the equivalent model of each component is decomposed into a single degree of freedom system. The physical parameters of the system are calculated, that is, the equivalent stiffness, equivalent damping and equivalent mass, so that a complete equivalent model is established. oMotion parameter optimization is the goal of motion curve parameterization, and the motion planning is the precondition of the optimization of the motion parameters. In this paper, the commonly used in industrial control, representative of the S type speed curve was select. Through motion planning, the motion parameters set separately for jerk G1、G2、G3、G4, After parameter optimization of equivalent simulation model, setting positioning accuracy of 3 microns. In the shortest time to meet the positioning conditions, optimize the optimal motion parameters G1、G2、G3、G4. In order to verify the actual effect of optimization parameters, the optimization parameters are set up to build a motion control system to drive the motor to run. Measuring the positioning time, comparing the optimization and the actual operation results. It is proved that the parameter optimization method can effectively reduce the positioning time, reduce the vibration and improve the accuracy of motion.