| Continuous change of semiconductor manufacturing technology, the diversity of products, the higher the complicated process of activity and state to state, on the preparation of high precision, the degree of automation of the equipment is also more and more high and semiconductor manufacturing industry of equipment price is also becoming more expensive. The equipment renewal and maintenance costs is the largest share of the enterprise investment. Therefore, mining equipment of the highest utilization rate to play all of its capacity for the company to create the maximum profit is the enterprise executives are thinking about a problem. Is also one of the important factors that determine the cost of chip manufacturing.The content of this paper is the CIM system production equipment capacity tracking system OEE(Owerall Equipment Efficiency) system, it is with the semiconductor manufacturing equipment contact most closely application. Through connected with the machine secs(semi equipment communication standard communication protocol has a connection to the machine, to automatically collect equipment operation data is used for the calculation of the equipment efficiency, OEE system will serve as the bottom interface to achieve the effect of CIM system and device management system connection, and the data in a specific format written in the log file. Using background scripts for database connection and operation, text log acquisition and analysis, through the network company to obtain each OEE client log files, and the use of OEE daemon, so as to read in the same way, parse out the required data and the data stored in the database, and then by use of database PL / SQL language to analyze the data and to compile data for each type of equipment. Furthermore, OEE information system not only to see the efficiency of production equipment, according to the statistics of the various operating equipment specific run time analysis of key factors influencing corporate loss of equipment efficiency. Thereby providing a powerful data basis for enterprises to improve productivity, reduce waste, save costs, but also provide a strong basis for decision-making for enterprise managers.This content of thesis paper first reviews the development of semiconductor industry, the evolution of chip manufacturing industry, and aided manufacturing system corresponding to the development of history. Computer integrated manufacturing system in the semiconductor manufacturing industry in the role and challenges, and puts forward the requirements of OEE system, and the need to make a comprehensive analysis. And finally classified the function module of OEE system and frame structure, and ultimately to the practical application in the company. |