| Quality-testing is an important part for MEMS product manufacturing.So far, Industry Micro-CT is an important method of MEMS product testing, but it’s limited to some degree.This article is about the building course for a software which is aimed at MEMS product and is used to construct its digital model based on series CT images,to test the geometrical feature,to test the manufacturing quality,and transform the surface model into tetrahedral mesh,which can be input into.finite element analysis software.In this article the demand of the software platform to build the overall framework of software platform is analyzed. According to the software function reasonable arrangements for the overall layout is made, the data structure is built and the interactive function is designed.and realizedIn this article the methods of building a high quality three dimension model based on the series CT images and the algorithms of the different courses are researched,some solutions to the problems of the algorithm is resolved,computer programming courses of the algorithms is realized, which concretely comprises of the following aspects.The results of the micro-CT scanning is analyzed,proper ways of dealing with micro-CT series of images is chosen.The MC algorithm is deeply researched,and a algorithm of optimizing the model building is proposed.The fitting Delaunay algorithm is researched,and the algorithm to improve the quality of tetrahedron element is optimized.In this article the detection methods for the reconstructed model of MEMS components is researched, the algorithm used in the process of feature analysis is formed. The approach to depart the structural features of the model and block reconstruction model into different MEMS components by its geometric feature is proposed;the surface fitting algorithm for the model is researched,and the program of the fitting algorithm for each block, based on the quadric fitting algorithm is designed and realized;the algorithm to analyze the geometric parameters for the model is designed;the format of the file of Abaqus software is researched,which is used to build the interface to import data files into Abaqus for the software.We import two series of CT images,which is of two MEMS components, into the software, rebuild and analyze the model to detect the function of the software. |
