Multi-layer Terahertz Corrugated Horn Antenna Based On MEMS Technology

Terahertz technology is one of the most important studies all around the world currently. Exploration of THz transmission lines and THz antennas has important practical implications on applications of terahertz technology. Design and implement of a highly integrated terahertz antenna is an inevitable trend of the development of terahertz system. Micro-electromechanical systems(MEMS) technology with high accuracy, consistency, low cost, can be used to manufacture terahertz antennas and functional devices. According to the above background, we study the design, preparation and testing of multi-layer corrugated horn antennas in terahertz band based on MEMS technology in this paper.Firstly, we discuss the terahertz antenna feeding technology based on multilayer MEMS technology. Above all, corrugated horn antenna theory is introduced, classification and field distribution of corrugated horn is analyzed in detail. Then, MEMS processing technology including body micromachining, surface micromachining, bonding technology, etc. is presented. Rectangular waveguide MEMS technology implementation process is expressed, with ICP etching technology, internal cavity metallization and Au-Au bonding included. Multilayer silicon MEMS technology and implementation method is proposed with the needs of THz functional devices. The implementation process of multilayer silicon MEMS technology is also given.In the second part, we accomplish design of terahertz corrugated horn antenna based on multilayer MEMS technology and corrugated horn antenna theory. We design circular aperture corrugated horn antennas, pyramidal horn antenna and diagonal horn antennas in the terahertz band based on the finite element method(FEM) considering the characteristics of MEMS technology. In the band 470-530 GHz, the antennas are with good characteristics of high gain, low side-lobe, symmetry radiation pattern and good matching characteristics of the antenna port.In the last part, terahertz corrugated horn multilayer process were prepared. We design the testing fixtures and assemble the antennas. The antenna pattern and VSWR are tested and the test results match well with the simulation results, verifying the feasibility of the experimental program design and simulation methods.