| X-ray diagnostic technology is widely used in astrophysics,laser fusion physics,inertial fusion ignition research,material composition analysis and many other fields.Especially the new light source appeared in recent years.Monochromatization of XUV light is a challenging task when a short XUV pulse is required,since the use of dispersive optics required for energy resolution introduces temporal broadening.For example,the two-grating monochromator and a single-grating monochromator by employing the off plane mount(OPM)grating configuration.However,a setup with multiple optical elements causes significant losses in the transmission efficiency.While the reflected zone plate(RZP)combined dispersion and focus in one,the zero-order background light can be excluded when operating in off-axis mode,and the theoretical focus size may be less than 10 nm.These characteristics allowed it to build system with a higher transmission efficiency,and moreover simplified the design.Therefore,this kind of optical element has attracted many attentions.At present,foreign countries have successfully used RZP in synchrotron radiation lines,free electron lasers and higher harmonics to realize monochromatic light source and a series of spectrometer applications,and achieved good results.Normal RZP is based on the grating equation,so that the quasi-monochromatic light obtained by spectroscopy will inevitably superimpose the harmonic components,which will degrade the spectral purity and inconvenience the follow-up spectrum.The main contents of this paper are as follows:Firstly,introduced the application of X-ray,the X-ray light sources and RZP-related theories including scalar diffraction,ray tracing,Fresnel and Gabor zone plate theories.Secondly,the structure,construction method and basic principle of the RZP are described,and based on the scalar diffraction theory,simulated the diffraction characteristics of RZP.A single-focus 1DRZP is proposed,and the simulation results show that it can effectively suppress the high-level focus.Thirdly,we designed and fabricated the visible light band RZP for test and verify the diffraction characteristics.Based on the principle of ray tracing,the designed RZP is simulated,and the diffraction characteristics are verified by experiments.At last,we designed a soft X-ray spectrometer using RZP based on the theoretical analysis and practical application for the analysis of laser plasma source and microwave plasma source.Including the optical and mechanical design of the spectrometer.Making theoretical and experimental foundation for the application of RZP and the monochromatization of new X-ray sources. |