Studyon Relative Sensitivity Factors Reproducibility Of Standard Samples In SIMS Quantitative Analysis

Secondary Ion Mass Spectrometry (SIMS), as a powerful tool for quantitative analysis of impurities in the semiconductor diode has been widely used in semiconductor field. At present, most SIMS quantitative analysis use the method of standard experimental calibration. Correction method of Relative Sensitivity Factors (RSF) is one of the widely used methods. It is based on reference elements of the standard samples. In fact, it is necessary to be further standardized because of being influenced by some subjective and objective factors such as instrument conditions, parameter setting, operator level differences and so on, so that the results of quantitative analysis of SIMS is more accurate and reliable. This article investigates and studies some references about applications in domestic and abroad of SIMS quantitative analysis, the standard sample, the test parameters and evaluation method of SIMS quantitative analysis precision. To serve GaN LED epitaxy thin film as the main study object, more than two thousand RSF data of five elements (Si?Mg?C?H?O) have been statisticsed and analyzed. The data are about the standard sample of CAMECA IMS-7f quantitative analysis, the repeatability and stability of quantitative analysis measurements. The article discusses the influencing factors on the precision and the effect of parameter setting on the results in SIMS quantitative analysis. It provides some references for further improving the accuracy of analysis SIMS. The following results were obtained:1. According to the statistical results obtained, the effects of the Electron multiplier variation on RSF is the most obvious, enhancing Electron multiplier variation is able to reduce electron multiplier yield (EM Yield), increasing the secondary ion intensity measured by the tested elements, decreasing the value of RSF.2. In the same period of Electron multiplier variation, the RSF value has the overall upward trend with the passage of time, which proves that electron multiplier produces aging phenomenon and leads to reduce secondary ion intensity detected, so that RSF shows a rising trend.3. The relative standard deviation (RSD) of the RSF statistics (Si, Mg, C, H) is rather small compared with Oxygen under the same test condition, which is mainly vacuum residue in cavity and the oxygen content of the surface of the sample that lead to background signal enhancement, so that the repeatability of test results is low.4. In the same test condition, the RSF of Silicon(Si), Magnesium(Mg), Hydrogen(H) are basically within 10% in the past two years, which prove that the instrument has a good repeatability. The RSD of the RSF of each element are more and more small, which proves that the data repeatability is better with the proficiency in operating and regularity enhancing.