The Precise Positioning In SEM Images

Nanomanipulation is one of the most important research in nanotechnology,its value in scientific, economic and social fields has become increasingly important to be seen as an important strategic technology. The influence of nanotechnology in different areas is more widely, such as nano-manufacturing,nano-assembly, biomedicine, nanomaterials, electronics technology. Thus an efficient and stable nanomanipulation system is widely used. On the basis of a single nanometer operating system perspective, in the paper, precise positioning of objects is been studied. To achieve precise positioning, the introduction of sub-pixel edge detection and the similarity of the precise location of the probe to study; to achieve precise positioning nanowires, the introduction of kernel density estimation, precise location information nanowires were studied;During the experiment, the probe as the main control tool for its ability to accurately locate, determine the success of this experiment. According to the SEM built Nano operating system, this paper uses the coarse positioning and precise positioning of combining methods to achieve fast and accurate probe positioning. Principle plane pinpoint the precise positioning is concerned, we use sub-pixel edge detection, accurate edge extraction probe to achieve precise positioning of the probe plane. For precise vertical positioning, the paper introduces the principle of similarity, to achieve the extraction of depth information of the probe. Test results show that the image plane of the probe pinpoint accuracy can reach sub-pixel level, precise vertical positioning of the probe can be quickly realized.During nano operation, the operation target is often relatively small objects(such as nanowires) to achieve precise operation, must be accurately obtain position information nanowires. Use kernel density estimation principle proposed adaptation SEM image of a small object recognition program. Then according to the principle of sub-pixel accurate positioning, Small target object positioning,precise positioning single nanowires. Experimental results show that the nanowires can not only quickly and accurately identified from the background,and the positioning accuracy of nanowires also improved.For tests appear overlapping nanowires special case, in order to extract the position information of the nanowire overlapping nanowires need to simplify, it forms into a single nanowire, then position information is obtained based on a single nanowire position information extraction method.