Research Of Magnetorheological Planarization Technology Based On Linear Oscillation

With the development of the optical technology, plane optical elements with the ultra smooth surface widely used. Most of traditional polishing technologies are not efficient enough and uneasy to control the processing quality, which make them difficult to meet the production requirements of large quantities, low cost and high quality.With its unique processing principle, magnetorheological polishing has been developing rapidly in the field of optical glass processing. Traditional magneticrheological polishing wheel can reach high surface precision as well as obtain low surface roughness, but its the low processing efficiency needs to be improved. The researchs put forward a kind of high efficiency magneticrheological planarization process, with a large area polishing tool. But the surface roughness of the machined workpiece needs to be improved. In order to solve this problem, this paper increases the straight line swing of the workpiece on the original basis to improve the flatness of the workpiece surface. The specific research works are as follows:(1) The trajectory equation of the relative motion between the workpiece and grits was established. According to the actual processing conditions, the path of the interaction between the workpiece surface and the polishing mold was stipulated as the effective processing trajectory. Lengths of the effective processing trajectories of single point at the surface of the workpiece under different forms of oscillation motion were calculated by means of discrete integral. From the effective length of processing, it can be preliminarily predicted that the oscillation motion of the X-X way can improve the flatness of the workpiece.(2) Specific processing experiment were carried out using self-designed experimental platform. Through the single factor experiment,influences of the straight-line swing, the straight-line swing distance, the straight-line swing speed, rotational speed of workpiece, machining gap, research speed of the polishing tank and other process parameters in material removal rate and the flatness of the workpice were researched. The experimental results show that the flatness(PV) of K9 glass is 2.578? Compared with the non oscillating surface PV 12.568?, the oscillating method can get better flatness.(3) The results show that the surface damage caused by the previous working procedure can be eliminated and the new damage is not caused by the magnetorheological planarization processing.