Preparation And Erosion Wear Mechanism Of ZrTiAlN Coating

ZrTiAlN coating with high hardness and good oxidation resistance,wear resistance and other characteristics has become a hot hard coatings research because of broad application prospects in tools,dies,microelectronics and other fields.In this paper,ZrTiAl N coatings are prepared by magnetron reactive sputtering.The effects of process parameters on the ZrTiAlN coating's properties,coating residual thermal stress characteristics and it's erosion mechanism are systematic studied.The coating distribution of residual thermal stresses are analyzed by ANSYS.Results showed that:(1)stress concentration appears at the edge of coating interface;(2)thermal matching of YT15 carbide coating with ZrTiAl N is better than 304 stainless steel,Q235 A steel and some other substrate materials;(3)Add intermediate Zr transition between the layer and base does not change the residual thermal stress distribution trend,but ZrTiAlN / Zr and Zr / YT15 interfacial thermal residual stress reduce 5MPa and 9.4MPa respectively;(4)with the intermediate layer thickness increases from 0 to 1?m,equivalent stress,tangential stress,axial stress and radial stress decrease 33.1MPa,12.5MPa,13.5MPa and11.8 MPa respectively.The effects of process parameters on the coating properties is studied.Results showed that:(1)with Zr target sputtering power increases from50 W to 150 W,Tu layer hardness,elastic modulus and adhesion respectively increase 72.6%,16.3% and 33.3% than before;(2)with increase of TiAl target sputtering power,coating's deposition rate almost unchanged,but mechanical properties decrease and surface agglomeration is more obvious;(3)compared with YT15-base ZrTiAlN coating,Q235A-based ZrTiAlN coating's surface and cross-sectional has many longitudinal and transverse cracks.The erosion wear characteristics of ZrTiAlN coating are studied by sandblasting experiment.Results showed that:(1)S2 has the highest erosion wear rate in eight different preparing parameters,followed by S8,S6,S7,S5,S4,S1,S3;(2)coating's erosion wear rate decrease withincrease of H / E and H3 / E2 values;(3)the higher hardness of ZrTiAlN coating,the more obvious of brittle material erosion characteristics appears characterized by its microscopic,the lower hardness of ZrTiAlN coating,the more obvious of plastic material erosion characteristics appears characterized by its microscopic;(4)YT15-based ZrTiAlN coatings' erosion mechanism are mainly coating brittle fracture,surface particle shedding pit growth and plastic deformation,while Q235A-based ZrTiAl N coating are mainly peeled off for failure of the coating caused by coating intrinsic crack propagation.