The Study On The Preparation And Application Of New Type PVD Cr Doped DLC Composite Film

Physical Vapor Deposition (PVD) technology is using physical effect to deposite new materials on basal surface under the condition of vacuum. Diamond (DLC) thin film is a kind of combination in the form of sp2 and sp3 keys of metastable materials. It combines the excellent properties of graphite and diamond which has been widely used in many fields.This paper used PVD technology and ICS-04 ARC PRO coating quipment to prepare two groups of Cr/DLC composite films with different thickness based on cathodic ARC. Studied the preparation technology and performance characteristics of the thin films. Two groups of specimens in the Cr deposition time respectively for 10 min and 30 min. After measuring instrument with nondestructive testing, the film's thickness of two groups of specimens is 0.7 u m and 0.9 u m respectively. It showed a linear growth with the increase of the deposition time according to the results, namely the deposition rate is stable. Using scanning electron microscopy to observe the microstructure of Cr/DLC composite films. It could be seen the surface of Cr/DLC films is smooth and dense, the interface between Cr transition layer and DLC layer is vague which had a good adhesion property. Measured the microhardness and bonding strengh of two groups of films by digital display type hardness tester and indentation method. The hardness is HV2500 and HV3000 and the bonding strength is HF2 and HF1 respectively. The results showed that the hardness and bonding properties improved with the increase of film's thickness.Finally, the process is optimized according to the results of performance and deposited Cr/DLC composite films on 718 rubber mould. The surface hardness, friction performance and corrosion resistance etc. of coated rubber mould improved obviously and its service life increased about 50%. This paper proved the feasibility of new PVD diamond-like caoting technology in 718 rubber mould and had a guiding significance for the future.