Research On Polishing Process Of CVD Diamond Micro Tools

Micro manufacturing is widely used in industry, with the development of micro manufacturing of more and more micro products are manufactured. At the same time the importance of micro cutting tool is also increasing. By using diamond micro cutter, the smooth surface can be cutted out with good work quality and high processing efficiency. As diamond micro cutting tools, polycrystalline diamond tool and diamond coated carbide cutting tools and has been widely used, but the study of CVD diamond micro cutting tools still had no progress. In this paper, preparation and sharpening of the CVD diamond micro tools were as the research object. The chemical mechanical grinding test and experimental research on the cutter forming, which is to ensure the quality of the cutting edge in grinding and the material removal rate in forming preparation, have been studied. The main research contents are as follows:(1) The traditional ordinary grinder which has a resolution of 1?m was used for grinding. And the CVD diamond micro tools are grinded by copper based tungsten carbide disc and aluminum based silicon carbide disc respectively. The copper based tungsten carbide disc obtained better edge quality in sharpening by promoting oxidative reaction of diamond. Through the comparison among different test parameters on the grinding quality, the better grinding direction, speed and feed rate are found out.(2) In order to find a better method to form the bottom of micro cutter, a polishing device was designed. And the device was used with iron plate, diamond grinding wheel with large grain size and copper based tungsten carbide disc for the experimental research of preparing the diamond micro milling cutter.(3) Through the contrast test of polishing efficiency under different parameters, high polishing efficiency can be achieved by using iron plate at high grinding speed. The large size diamond wheel has the best grinding effect, and it is suitable for forming CVD diamond micro tool.(4) Using copper based tungsten carbide disc sharpening CVD diamond micro tool with optimized grinding parameters, the best cutting edge radius which has been achieved is 2.5?m.