Research On Pillar Phononic Crystal Cavity's Mode In Sensing Significant Technologies

As a new artificial acoustic phonon crystal materials,the point defect mode can form high quality factor acoustic resonator due to energy localization effect.It provides a new way to achieve high resolution acoustic sensor and the liquid phase detection.In this paper,we study the theory and experiment in the processing of the pillar phononic crystal cavity's mode,phononic crystal structure design and dissipation factor.The main contents and conclusions are as follows:1.Through the finite element method,we choose the silicon phononic crystal structure parameters and discuss the point defect mode of vibration.Then,we give the experimental basis.2.We further the study in phononic crystal selective incentives for defect mode on the base of earlier stage.Then we give the electrode structure and performance analysis of the phononic crystal in order to lay the foundation of phononic crystal related applications.3.In order to solve the problem where mass loading and liquid processing are difficult in normal phononic crystal,we combine the research group's study in processing of the phononic crystal,sensing characteristics and performance evaluation to give the pillar phononic crystal cavity's manufacture method.Beside,we propose a high practical value of the sensor structure and processsing.4.We give the loss analysis to pillar phononic crystal and get the major loss factor which is affect Q value in cavity's mode.Then,we give the factor where production processing and process route can affect the device.Finally,we fabricate the pillar phononic crystal sensor and the Q value in the air is 700.This paper provides the theoretical and experimental basis for the phononic crystal point defect model applying to acoustic quality sensing and liquid detection.