Synthesis And Characterization Of Diamond-like Carbon Films Based On Glass Substrates

In this paper,Diamond-like carbon(DLC)films were deposited on the glass substrates by the self-made 1k W/2.45 GHz microwave plasma chemical vapor deposition(MPCVD)instrument.The X-ray photoelectron spectroscopy(XPS),field emission scanning electron microscopy(FESEM),Raman spectroscopy,UV-Vis spectrophotometer and the friction-wear spectrometer were used to characterize the stracture,morphology,and optical performance and friction properties of DLC films prepared by various conditions.The relationship between structure and properties was investigated in this paper.And the appropriate prepareation paremeters of DLC films based on glass substrate has been obtained.The result of XPS showed the carbon film deposited on glass substrate was typical diamond-like.The C peaks and a few O peaks of the spectras implied that some impurities were generated on the film surface.Through the Raman analyse,the films were the typical diamond-like carbon films,the content of sp~3 bonds in the DLC films could be increased by reducing the deposition time.Through the UV-Vis spectrophotometer analyse,high absorption of DLC film was observed when the light wavelength equal to 300 nm.The transmissivity of films was improved by increasing the wavelength,which would be high transmittance at the visible and near infrared region(above 600 nm).Through FESEM analyse,the DLC films were composed of carbon particles which were uniformly dispersed,and the films surface were dense and smooth.The decrease of particle size and the increase of compactness of the carbon films could be casused by the increasing deposition pressure.Through the friction-wear spectrometer analyse,the friction curves showed that a more stable process with the lower friction coefficient,which would decrease the wear rate of the substrates.