The Study On Roll-to-roll Ultraviolet Micro-nano Imprint Lithography Techonogy And Equipment For Superhydrophobic Film Fabrication

As a research hotspot in the field of materials,superhydrophobic materials have excellent self-cleaning effect,which can effectively reduce the adhesion of dust,snow,and particles on the surface.Because of self-cleaning performance,superhydrophobic materials have great significance in water saving,energy saving and extending products'lives.And people want to apply them in construction,transportation,energy,medical,clothing and other industries.In this paper,we proposed a new roll-to-roll ultraviolet imprint lithography(RtR UV IL)technology and developed an equipment for large area superhydrophobic materials fabrication.Due to the RtR micro/nano imprint method and fast UV curing technology,the micro patterns could be transferred to a flexible substrate without complex fabrication process in a clean room.By this way,large area superhydrophobic film could be fabricated rapidly and efficiently.This paper focuses on discussing the RtR UV IL technology and the related mechanical parts of the equipment which is used for the superhydrophobic film fabrication.After optimizing this process,a 20?m*40?m*17?m(diameter*pitch*height)micro-structure array was successfully transferred by using modified UV resist.The water contact angle reached up to 150°after fluoride treatment.Finally,we attempted to fabricate T-shaped micro-pillar array by this equipment to obtain superhydrophobic materials.In addition,demoulding between imprint template and transfer layer is the key to the success of roll-to-roll micro-nano imprinting.The paper also analyzes the demoulding conditions theoretically.