Research On A Three-dimensional Resonant Triggering Probe System Based On Visual Navigation

With the development of the science and technology,the precision of ultraprecision machining technology has achieved the accuracy of nano-level.The miniaturization of the feature sizes of micro-devices such as MEMS,super precision optical devices,etc.raise new requirements to nano measurement technology.Traditional coordinate measuring machine(CMM)is no longer applicable in this situation.So research on micro/nano-CMM has become one of the hottest subject nowadays.As the key component of micro/nano-CMM,it is essential to develop a high-performance and reliable micro/nano-CMM probe.Many scientific research institutions have made certain achievements on developing miro/nano-CMM probes.However,facing with the harsh requirements of micro/nano-CMM probe such as high measuring efficiency,high precision,low measuring force,capacity of three-dimensional measurement etc.,there is no mature solution so far.In order to fulfill the research requirements and overcome the technical bottlenecks of micro/nano-CMM probe,a three-dimensional triggering measurement method is proposed.Moreover,based on this method,a visual navigation three-dimensional resonant triggering probe system is developed.According to the experimental result,this probe system can realize three-dimensional profile triggering measurement with the resolution less than 1nm and the measurement force less than 10?N.The main work is as follows:(1)The dynamic mechanical models of the three-dimensional triggering measurement method: The microsphere tip of the probe interacts with the sample surface in tapping mode in the Z direction,whereas it interacts in friction mode in X and Y directions.The dynamic contact mechanism of the probe is based on interfacial force theory and mechanical models of the interactions between microsphere tip and sample surface in X,Y,and Z directions are constructed and simulated.(2)Software programing: Owing to the guidance of visual navigation system,probe system developed in this paper has the ability of automatic approaching.The control software is programed using C++ language under the Visual Studio programming environment.Besides the visual navigating part,other functions such as the performance testing of the probe,automatic 3D profile measurement,motion control etc.are also programed successfully.(3)Experiments and tests: Based on the prototype of the three-dimensional resonant triggering probe system,characteristic tests such as the approaching force curve test and triggering repeatability error test etc.are performed to evaluate the performance of the probe system.In order to verify whether the probe system has the ability of three-dimensional profile measurement,a diesel engine nozzle is measured by this probe.