Experimental Research Of Machining Periodic Nano Structrues Based On Material Stacking Effect

Periodic nanostructure has a special optical and electrical effect due to their spatial periodic characteristics.They have broad application prospects in optics,sensors,microfluidics,microelectronics and so on.With the developement of nano-machining technology,basing on atomic force microscopy(AFM)for nano-scratching process gradually reflects its unique advantages.This thesis mainly studies how to use AFM to process periodic nanostructures on single crystal copper surface.A process of machining periodic nanostructures based on material stacking effect is proposed,the Molecular Dynamics is used to simulate the process,and the mechanism of material accumulation is obtained,study on how to develop periodic nanostructures with high efficiency and low cost.Firstly,the forming of material stacking in nano-scribing process is studied by Molecular Dynamics.The effects of different process parameters(probe shape,feed,load,etc.)on the formation of material accumulation during the process and the influence of the structural morphology are studied.And the formation rule of material accumulation in the process of single crystal copper nano-characterization is obtained,which provides theoretical guidance for AFM scratching experiments and the formation of periodic nanostructured processes based on material stacking effects.Secondly,nano-scratching experiments with AFM is performed,and the effects of different process parameters(probe shape,feed,load,etc.)on the formation of material accumulation during the process is studied.By comparing the results obtained by AFM scratching experiments and the results obtained by Molecular Dynamics simulation,verify the preciseness of molecular dynamics simulation.On this basis,we discuss the optimization processing technology of basing on the material accumulation effect to form periodic nanostructures.Lastly,based on Fast Fourier Transform(FFT),an evaluation method of periodic nanostructures is proposed,evaluate to the periodic nanostructures processed of this peper.The application of periodic nanostructures is explored,and the application of periodic nanostructures in the field of metallic coloring is discussed.Periodic nanostructures with different patterns are processed,and analyze its metal coloring effect.