Study On The Technology Of Elastic Emission Machining With Dual-Rotor Based On Hydrodynamic Lubrication

The ultra-smooth surface has been requested by modern optics and electronics.Elastic emission machining(EEM)is an important method to obtain ultra-smooth surface based on hydrodynamic lubrication effect.However,this polishing method has a bottleneck problem to further reduce surface roughness.To solve this problem,this thesis studies the technology of elastic emission machining with dual-rotor(EEMDR)from the following aspects: polishing device designing,mechanism and simulation,process experiments,application and expectation.The main contents are as follows:(1)Polishing device design depending on the desired performance.Firstly,the key components such as motor and slip rings are selected.Secondly,the rotation shaft and the revolution shaft are analyzed by the finite element analysis method.Finally,polishing experiments are conducted to verify the stability of the device.(2)Simulation and theoretical calculation on the flow characteristics and polishing particles motion based on hydrodynamic lubrication effect.Firstly,fluent simulation is conducted to reveal the relationship between the polishing clearance and fluid shear stress.Then the model about the polishing wheel turning pattern and the impact of radial runout on the clearance is established.Secondly,force analysis on the polishing particles is conducted to account for the influence of rotation speed on the material removal rate and material removal in elastic mode.Finally,flow characteristics on the condition of revolution and the influence of revolution speed on the fluid shear stress are both revealed by simulation(3)Parameters are optimized by process experiments with the index of surface roughness.The optimal parameters are acquired by polishing clearance experiments,rotation speed experiments and revolution speed experiments,and the minimum roughness value is obtained with these parameters.(4)Polishing experiments on the several materials are conducted.Quartz glass,glass ceramics and silicon are polished by EEMDR,and ultra-smooth surfaces on the quartz glass and silicon are obtained.The surface roughness on the quartz glass is 0.0801 nm rms(root-mean-square).The result of the glass ceramics is bad and the reasons are studied.In conclusion,to solve the problem of EEM and obtain ultra-smooth surface,this thesis studies the device,mechanism,experiments and application of the EEMDR.This will contribute to the development of ultra-smooth surface processing technology and have great significance in the theoretical guidance and practical applications.