Ion Beam-induced Nanostructure Formation On Muscovite Surface

In recent years,ion beam technology shows its uniqueness and effectiveness in the formation and precise control of nanostructures on various surfaces of materials.The research in this area is very meaningful for the actual application on the surface of materials.This article is divided into two parts,one part is the study of ion-induced mica surface nanostructures,and the other is the investigation of low energy ion-induced mica surface nanostructures(The mica used in this experiment is muscovite).In the first part,we used Li,C,O ions with energy of 0.34-6 Me V to irradiate muscovite.We studied the characteristics of the nano-peak structure of the muscovite surface induced by it,and did some numerical simulation of the previous experiments.The numerical calculation using the inelastic thermal peak model obtained a good agreement with the experimental data.In the second part,we used Xe ions with 2.3kV and 8kV accelerated power to irradiate muscovite material.In addition to the perpendicular incidence method,we also used grazing incidence with different angles.The result is as follows:For the first part of the study,we found that the bottom of the peak diameter and height increase with the increase of the electron energy loss of the incident ions,and the nano-peak structure is a peak shape with a peak height greater than the bottom radius of the peak.The nano-peak diameter calculated by the non-elastic thermal peak model is basically the same as the measured nano-peak diameter.The predicted electron energy loss threshold is significantly lower than the measured value of this experiment.The second part of the study found that the peak height and the bottom diameter increase with the increase of the ion potential energy at normal incidence,and the ratio of the average height of the small peaks to the average diameter of the bottom at normal incidence does not change substantially with the charge change of the incident ions;in the case of grazing incidence,the height of the peak at the same grazing incidence angle decreases with the increase of the ion potential energy,and the height of the peak is higher than the peak height at normal incidence.The change of the ionic state or the change of the grazing incidence angle will affect the shape of the bottom of the small peak.The higher the ion valence is,the larger the grazing incidence angle is,the more ellipsoidal the shape is.