Research On The Key Technologies Of Miniaturization Of Total Reflectance Fourier Transform Spectrometer

All-reflection Fourier transform spectrometer is a spectrometer with no transmission element. Compared with the non-all-reflection Fourier transform spectrometer, the all-reflection Fourier transform spectrometer is not limited to the material transmittance, and can be applied to the whole spectral region. So the all-reflection Fourier transform spectrometer has important application value. At the end of 20 th Century, with the development of science and the progress of micro manufacturing technology, the micro and small spectral instruments became the focus of research. The key technologies of the miniaturized all-reflection Fourier transform spectrometer including the near field measurement technique with non-focal plane mirror, the weak light detection ability enhancement technology and the interference field's intensity distribution acquisition drive technology are studied in the paper.Firstly, the near field measurement technique with non-focal plane mirror is studied. The near field measurement's nonlinear problem is raised by analyzing the spectrometer's wavelength calibration technique. By establishing the " the same optical path difference hyperbolic family " model, the near field measurement nonlinear problem is analyzed, and the " multi-pixel subtraction pumping " technology solution is proposed. The simulation results show that the measurement error of the spectrometer can reach level III(national standard 178-2007 JJG "spectrophotometer verification regulation").Secondly, the weak light detection ability enhancement technology is studied. The light path analysis shows that the half of light energy emitted by the all-reflection Fourier transform spectrometer from the entrance slit is virtually wasted. The structure of the Fresnel bimirror is improved and the performance analysis shows that the improved structure can double the spectrometer's optical energy utilization ratio. The simulation results show that the Fourier transform long-wavelength measurement range is doubled under the conditions of the same wavelength measurement accuracy, and the spectrometer's weak light detection ability is also doubled.Finally, the interference field's intensity distribution acquisition drive technology is studied. By comparing the driving methods, the paper adopts the method of CPLD drive. The acquisition and drive circuit is designed and the relevant process is programmed and debugged. The experimental results show that the designed process meets the requirements.The work in the paper provides a basis for the realization of the all-reflection Fourier transform spectrometer's miniaturization.