Angle Insensitive Color Filters Covering The Visible Region

Color filters have played an important role in enormous applications such as imaging sensors, liquid crystal display, decorations and solar cells. Angle insensitive color filter based on Metal-SiOx-Metal structure is proposed in this paper, which has good optical performance and can be fabricated easily. Silicon oxide deposited by reaction magnetron sputtering with a tunable refractive index is introduced to meet the strict angle insensitive resonance conditions. We fabricated a series of SiOx thin films by adjusting the O2 flow rate during the deposition and then analyzed the optical parameters. Finally we designed and fabricated the angle insensitive color filters covering the visible region. The angle resolved spectral almost keeps still when the incident angle increases from 0° to 60°.The peak transmission is over 32% for transmission-type and the reflection is over 60% for reflection-type...