Design Of Integrated Optical Accelerometer And Test System

Accelerometers are important sensing components in intertial navigation, intertial guidance, and control system, and widely used in fields such as missile guidance, aircraft navigation, attitude control of satellite, brake control system, vibration measurement of large electrical equipment, geological prospecting, and so on. In recent year, along with the development of micro mechanical processing technology and integrated optics technology, accelerometers based on MOEMS have been attracting more attention from domestic and international, which have prominent advantages of integrated and miniaturization in micro mechanical accelerometers and immunity to electromagnetic interference, high accuracy in optical accelerometers. Compared to the characterization way of properties parameters in tiontraditional mechanical and fiber optic accelerometers, MOEMS accelerometers involving optical, electricity and material mechanics and so on various performance parameters. So it is very important to professional design the test system of MOEMS accelerometers. The study emphasizes on a Mach-Zehnder (MZ) interference based optical waveguide accelerometers and a Fano resonance based optical waveguide accelerometers which innovatively presents, with main content about structure design, simulation analysis and preparation process of devices, the design of the signal detection system, the construction of the integrated optical accelerometers dynamic testing analysis platform, and have tested the performance of sense in the two accelerometers. There are some research tasks in the dissertation, as follows:1?The mathematical model of sensing mechanism is detailedly derived, the transfer function and the sensitivity formula of optical waveguide structure is obtained, and acceleration sensitivity with the influence of cantilever beam structure parameters and the structural parameters is analyzed.2?According to the relation of light intensity and acceleration, the sensitivity of accelerometer have been analyzed with different parameters. The simulation results shows that sensitivity is depend on the thickness and Young modulus of cantilever, loss coefficient, coupling coefficient. The theoretical sensitivity of Fano structure is 393-fold than MZI which is 0.28 mW/g and 111.75mW/g, respectively.3?The optimization design of waveguide structure and technological process with two different polymer materials is achieved. And it shows bright facular and soft flexibility.4? Signal detection system is designed based on integrated optical accelerometer. Completed the design of hardware and software of the signal conditioning circuit. Realized the modulation circuit of signal collection, and finally completed waveform display with sampling signal on the LCD screen.5?Integrated optical accelerometers dynamic testing analysis platform is completed. The test results shows that the sensitivity of the MZ interference accelerometer is 192.31 mV/g, the output voltage of the chip and the reference accelerometer show good linearity, the resolution and the dynamic range of chip is 10-2g and ±2g.