Research Of The Fabrication And Imaging Detection Of Graphene-based Liquid Crystal Microlens Arrays

Electrically controlled liquid crystal microlenses(ECLCMs) are a new kind of optical components, and already demonstrate many special optical performances such as electrically adjusting focus, electrically swing focuses, and performing some particular imaging detection operation. Normally, the metal or metal oxide electrodes of ECLCMs, such as typical ITO electrodes, show some disadvantages including relatively large film-thickness, unable being bended, low electrical conduction, and only being suitable to visible and near-infrared wavelength. In this dissertation, graphene materials with some perfect properties including: high transmission in the range from visible to infrared wavelength, excellent conductivity, being easily bended, and low-cost, are utilized to fabricate both electrodes of ECLCMs. Two kinds of graphene-based liquid crystal microlens arrays(GLCMAs), have been fabricated effectively, and electrically adjusting focus measurements and electrically controlling imaging detection have been carried out in visible range. The GLCMAs demonstrate remarkably characters such as small focal-spot size, high transmission in the range from visible to infrared wavelength, and excellent imaging detection function. The mainly contents are as follows:1. By analyzing the transferring process of graphene materials, the technological flow of performing graphene transferring from initial state onto needed wafer is determined, and thus the graphene films are successfully transferred onto the surface of quartz and ZeSn wafer, respectively;2. The factor that several key technological parameters in UV-lithography and RIE etching affect the fabrication of patterned graphene mask, is discussed carefully, and thus the patterned graphene masks are fabricated efficiently;3. The optical path system for testing electrically adjusting focusing properties of GLCMAs is set up, and the electrically adjusting focus behaviors of GLCMAs over quartz substrate and ZeSn substrate, are acquired, respectively, so as to show that GLCMAs have excellent characteristics of focusing and adjusting focuses.4. Imaging testing system suitable to visible range is constructed, and particular imaging detection measurements using GLCMAs over quartz and ZeSn substrate are carried out, respectively, and then demonstrate that GLCMAs fabricated have excellent particular imaging function, and thus lay a concrete foundation for further developing advanced 3D imaging and bionic compound eye.