Optimization Design And Experiment Research On Traceable Micro-nano Force Measuring System

Currently in the micro-nano research field,the measurement and traceability for micro force(10-8 ~ 10-4 N)has not yet formed a unified plan.However,it is widely used in the biological medicine,new materials,aerospace,microelectronics and other fields,so it is in urgent need to form a unified measurement standard in order to enhance the key technique in the related fieldsThis paper completed the research of micro force measurement system based on the principle of electrostatic force,this main content and main work in this paper is as follows:1.Analyzed the significance to establish the micro force measurement standards,detailed the research status at home and abroad and the prophase scheme in laboratory.2.Analyzed the working principle of the measurement system,introduced each function module in the system.3.Because the range and precision of the measurement system is mainly determined by elastic elements,finally selected the parallelogram flexible hinge as the elastic sensitive element in the system,and carried on the statics and dynamics analysis,in order to reduce the effect of creep on the measurement,designed the differential hinge scheme as the ultimate micro force sensitive structure.Designed the flexible hinge with gravity balance which can reduce the influence of long-term suspension of electrodes to the flexible hinge.To explore the force measurement in smaller magnitude the reed elastic support is designed.4.Improve the internal and external electrode based on binocular vision alignment measurement and adjustment system,it has a precision of 5?m to adjust the eccentric error,and 0.030o to adjust the tilt error,this scheme can make the relative uncertainty of capacitance gradient less than one over ten thousand in theory.Designed a reasonable capacitance gradient calibration scheme,and obtained a high repeatability of less than one over a thousand.5.Set up the measurement system,completed the selection of key devices,and wrote a complete set of control software.6.Carried out coaxiality measurement and adjustment experiment,capacitance gradient calibration experiment,the hinge stiffness test experiment,quality and electrostatic force comparison experiment,reed resolution test experiment,etc.Analyzed the error sources of measuring system and the related standard uncertainty,the analysis results show that measurement uncertainty of the force within 10-5 N~10-4 N is less than 2.5%,and the leaf structure can make the system resolution up to nN.