The Fabrication And Rotating Motion Of Hydrodynamic Microturbines

Scientists have been able to use some kinds of microfabrication technology(LCGA technology,photolithography technology,laser processing technology,etc.)to design and fabricate micro/nano structures with different types and functions because of the continuous development of human’s science and technology.These varied microstructures have also been widely used in biology and medicine,environmental detection,microchip,chemical sensors,etc.The microscale’s drive mode has also become a research hot spot gradually,due to the development of microstructures.In general,microscale’s drive mode can be divided into: magnetic drive mode,electric drive mode,optics drive mode,hydrodynamic drive mode,chemistry drive mode,and so on.We should choose the most suitable drive mode only according to the different situation because of the different types of microstructures.Fluid power is a kind of renewable energy which is given by the nature,has brought great convenience to human life,such as hydropower,water transport,the underwater detection and so on.In this paper,a hydrodynamic drive microturbines are studied and introduced.Femtosecond laser direct writing(FsLDW)technology has already become a rapid developing technology advantage over the traditional laser processing technology,due to its avoiding thermal damage,high resolution,programmable.It has become a rapidly developing technology in the field of micro/nanostructures machining.The variously parameters-adjusted microturbines were fabricated by FsLDW.The rotation speed can be controlled by velocity of flow,tilt angle of blade,blade length,and blade number.The energy conversion efficiency of the microturbines is also studied.And the rotation direction of blades in microturbine can be decided by tilt direction of blade.A complex linkage system constituted two microturbines could be designed and achieved.When acetone flow was taken to the two microturbines a synchronous rotation of the two interdigitated microturbines was immediately observed,due to opposite blade orientation.In addition,microtubine has been implemented as rotated motor in microfluidic channel for flow sensing.The microfluidic channels were fabricated by UV-lithography technique.And the microturbine eccentrically placed within a microfluidic channel.In order to better understand this relationship between flow direction and microturbines’ rotation direction,the stress analysis of the liquid inside microturbines was carried out.No additional environment field is required to drive output signal of the microturbines,which simplifies miniaturization and integration in microsystems.The ingenious and rotatable microturbine result in a high-performance flow sensor with no power consumption and potential for remote detection.Hydraulic power can be transferred to the mechanical energy of the microturbine,and then combine with electromagnetic transducer parts,converted to electrical energy.So such microstructures would have great potential in applications such as integrated energy conversion,obtaining energy from the environment to provide electrical energy for micro devices.