| Based on the National Natural Science Foundation of China “ Design Theory of Fluid Dynamic Coupled Flexible Actuator Driven by Pizeoelectric ”(No.51405189)and Project 2016072 supported by Graduate Innovation Fund of Jilin University,a novel piezoelectric pump is presented,both finite-element analyses and experiments are carried out.An experimental prototype of the proposed pump was designed and manufactured.The experiment platform is built to test the output performance.Air and pure water were used to test the output performance of the novel piezoelectric pump and the optimal structural parameters can be obtained with the driving voltage of-500 V-1500 V.The specific research work of this paper is as follows:The MFC model with complex structure can be simplified by using the constitutive relations of piezoelectric ceramic materials,ignore the effect of voltage on its thickness and width,the three dimensional piezoelectric constitutive equation can be simplified to one-dimensional form,the stress-strain relationship of fiber length direction was derived.Related theoretical method for the proposed pump was analyzed.The driving element of the pump consisted of two macro-fiber composite(MFC)layers cross bonded on a circular beryllium bronze substrate.The structure and working principle of the new type piezoelectric pump are described and the deflection of the substrate at each point in the load region was investigated.Simulation analysis was taken with software.Selecting the smallest structural unit of MFC for the research,the results show that driven by alternating voltage the MFC elongation and contraction alternates with each other,the deformation increases when raising the applied voltage.Through simulation to explore the influence of substrate thickness,angle of the two pieces of MFC and plaster mode on the deformation of the novel actuator.Results show that when driving frequency coincides with the first step curved resonance frequency of the novel actuator,it arched and the deformation increased from the periphery to the center.The deformation of the novel actuator rises with thickness of the substrate decreasing.Deformation of the check valves rise with thickness of the thin film decreasing by simulation analysis,the open mode of the wheel valve is moving vertical and its flexible cantilever makes better tightness than the cantilever valve.The experimental unit of the piezoelectric pump based on MFC was designed and manufactured,the experimental platform was built and the experiment was carried out as follows:1.With the driving voltage is 220 V at 40 Hz,the novel actuator with clamped boundary was taken as the research object,the deformation of the it is determined with the substrate material is PET thin film or beryllium bronze sheet respectively,the results show that the deformation shape of the novel actuator is consistent to our expectation only with the beryllium bronze sheet is used as substrate.2.Experimental test the deformation of the novel actuator influenced by different support way with the driving voltage is-500V-1500 V.Experimental results show that,the first order natural frequency of the novel actuator with clamped boundary is between 40Hz-45 Hz and with hinged boundary the frequency is 12 Hz,the deformation of the novel actuator with hinged boundary is much greater than that with clamped boundary.3.The output performance of the pump was tested with different structural parameters such as thickness of check valve,height of the pump chamber and diameter of the inlet/outlet.Results show that when air was used as experimental medium the pump works best with thickness of check valve is 0.025 mm,height of the pump chamber is 0.2mm and diameter of the inlet/outlet is 5mm,the maximum flow rate is 380.88ml/min,when the experimental medium is pure water,the best performance of the pump is with thickness of check valve is 0.05 mm,height of the pump chamber is 0.2mm and diameter of the inlet/outlet is 4mm,the maximum flow rate is 28.7ml/min. |
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