Performance Improvements And Systematical Testing Of Micro/Nano-CMM

In order to make the coordinate measurement machine(Micro/Nano-CMM)reach the high precision measurement of 3D feature size of the microstructure,the author mainly has done the following several works:1.The problems of the Z spindle on the aspect of drive controlling in the coordinate measurement machine were pointed and solved.The Z spindle can implement the different patterns of linear motion in a more flexibly and smoothly way.2.The unstable problem of the output signal(the output signal can change along with the temperature)of the linear diffraction grating interferometer(LDGI)in Z spindle has been solved.The quality of the interference signal and the precision of the displacement resolution have been improved.3.The structure and the signal processing method of the scanning probe used in the coordinate measuring machine have been optimized.The measurement error of the CMM has been separated and calibrated.The touch-trigger repeatability of the probe along X,Y and Z directions are better than 20 nm,20nm and 4nm.4.The positioning error of the single spindle has been compensated by using an angle sensor based on the autocollimator principle.The pitch and yaw angles of the measuring machine in the process of the linear motion can be used to compensate the abbe error of the displacement measurement.The positioning precision has been thus greatly improved.5.The systematical test of the CMM,including the measurement of the flatness,thickness and step in three directions has been completed in ideal experimental conditions.