A Certain Type Roots Vacuum Pump Vibration And Noise Inquiry

Roots vacuum pump as a vacuum pump,is widely used in the semiconductor industry,flat panel display IC equipment industry as well as areas film,chemical,biological,pharmaceutical and other industries,the work environment in these areas are clean and free of oil,corrosion-resistant and able pumping particulate substances.Currently,the major gaps Roots vacuum and foreign production of Roots vacuum pump production in China is still reflected in the reliability requirements of Roots vacuum pump,Roots vacuum exists vibration,noise is a big problem and a high failure rate.While foreign Roots vacuum pump can not access more than ten years.Therefore,the vacuum pump vibration,noise control is particularly important.The main work is as follows:In this paper,the characteristics of the mechanical structure Roots Roots pump rotor system simplifies the mathematical model of the Roots-type rotor.Then,based on theoretical knowledge of rotor dynamics equations of motion to establish a double disc rotor system,and taking into account different support conditions.When the rotor system is a rigid support,list kinematics 8 degrees of freedom;when the rotor system is a flexible support,list kinematics 12 degrees of freedom.Respectively,supporting different kinematics solving situations,solve for the natural frequency of the different support situations.Use Denmark B&K vibration test equipment,the Roots rotor natural frequency test,the results obtained and compared with the solution,the solution was to verify the correctness of the results.Roots vacuum inquiry to find the cause of abnormal vibration.Use Denmark B&K vibration noise test equipment,through and other continuous lifting frequency experiments Roots vacuum pump vibration response characteristics and at regular intervals,initially suspected to not change over time bright lines with a natural frequency;experimental modal analysis was Roots vacuum pump the natural frequency,modal shape and other characteristics to determine the cause because the resonance vibration anomalies;and finally,at steady state,determine the location and characteristics of vibration and noise sources through the use of vibration and noise source identification methods to verify the structural resonance is the Roots pump vibration is too big factor.