Study On Key Technology Of Miniature AlN Piezoelectric Vibrating Energy Harvester

With the rapid development of micro-energy harvester technology,the miniature vibrating energy harvester,aiming at the efficient acquisition and conversion of the environmental vibration energy,has become a hotspot in recent years Because of the characteristics of excellent physical-chemical properties and compatibility with microstructure processing of AlN piezoelectric film,the research of miniature vibrating energy harvester based on AIN piezoelectric film has been carrued out,which has important significance and requirements.Taking the sustainable power supply for wireless sensor networks node as the research background,on the basis of analyzing the physical-chemical properties and process compatibility of the common piezoelectric film,the paper proposed a miniature piezoelectric vibrating energy harvester based on the high performance AlN film which takes the environmental vibration energy efficiently obtaining and converting as the goal and the structure of cantilever beam – mass.On the basis of analyzing the structure and working principle of the device,we analyzed the main factors that affect the output performance of the miniature AlN energy harvester using the lumped parameter model.Aiming at the application environment,the main technical indexes of miniature AlN piezoelectric vibrating energy harvester were determined.The ANSYS finite element model of the device is established and the structural optimization design of the device is completed.We focus on the process parameters of preparation(002)preferred AlN piezoelectric film,and explored the doping modification of AlN films.The three-dimensional microstructure-compatible processing technology process of AlN energy harvester and the process parameters of AlN films were developed,and the principle prototype was successfully developed.Under the external excitation of 204.6Hz when acceleration is 1 g,the prototype can generate output voltage of 2.3 V and the output power of 66.13 ?W at the optimum load.The main work of the thesis are as follows:(1)Based on the research status of miniature AlN piezoelectric vibrating energy harvester at home and abroad,then determine the overall research scheme of the thesis.(2)Propose a miniature AlN piezoelectric vibrating energy harvester based on cantilever beam – mass structure.Based on the lumped parameter model,analyze the main factors affecting the resonant frequency,output voltage,output power of the miniature AlN energy harvester.(3)Carry out the finite element modeling and simulation analysis of the miniature AlN piezoelectric vibrating energy harvester in ANSYS simulation software,and complete the structural optimization design.(4)Focus on the preparation process of AlN piezoelectric film with(002)preferred orientation.Explore the doping process of AlN piezoelectric film.Develop the process of AlN film and miniature AlN piezoelectric vibrating energy harvester based on the three-dimensional microstructure.Then developed principle prototype.(5)Study the test method of the performance parameter of the prototype,build the test platform of the prototype,then complete the test and analysis of the prototype.Under the external excitation of 204.6 Hz when acceleration is 1 g,the principle prototype can generate output voltage of 2.3 V and the output power of 66.13 ?W...