Design And Research On High Performance Aerostatic Bearing

Because of the advantages of high precision,great thermal stability and non-pollution,aerostatic bearings are widely used in the ultra-precision machinery.The development of the ultra-precision technology results in the higher performances of aerostatic bearings.Therefore,it is necessary to build an accurate gas lubrication model to analyse the performances of the bearing and advance feasible processing technics to achieve the high performances.This paper focuses on the analysis and optimization of the static performances of aerostatic bearings with the use of finite difference method(FDM).According to the analysis results,the aerostatic guideway and turntable are manufactured based on the advanced optical manufacturing technology and the ultra-precision cutting technology respectively.The major contribution of the work can be summarized as follows:1.The solution method for Reynolds equation is put forward.Combining the method of the flow-difference feedback,the pressure distribution of the gas film and the static performance the bearing are obtained.The optimizations of structure parameters of single hole,compound throttle and multi-hole thrust bearings are studied.The feasibility of the high stiffness bearing and the accuracy of the theoretical solution are validated by tests.2.The ultra-precision aerostatic guideway is designed based on the optimizations of structure parameters of the multi-hole thrust bearing.The advanced optical manufacturing technology is applied to manufacture the guideway surface and the guideway parallelism reaches 0.1μm.The straightness of the guideway system is 0.1μm/150 mm,which achieves the aim of high accuracy guideway.3.The ultra-precision aerostatic turntable is designed based on the gap thrust bearing and the multi-hole radial bearing.The ultra-precision cutting technology is applied to manufacture the turntable.The parallelism of the surface of thrust bearing reaches 1~2μm.