Heat Transfer Characteristic Research Of Flat Micro Heat Pipe With Silicon-based Non-constant Width Rectangle-channels

With the rapid development of microelectronics technology,electronic equipment tendsto miniaturization and miniaturization.The rapid increase in integration makes the “hot spot”become more prominent,this problem has become the bottleneck of microelectronic industry improvement.Therefore,efficient method of cooling is an important part to promote advances in electronic industry.Plat micro heat pipe has the characteristic of small size,average temperature,easy to stick with chip,strong heat transfer ability and good environmental adaptability,it will have great practical values.This paper design and make some plate micro heat pipes with rectangular unequal width channel,which is used to analyze the heat transfer ability of micro heat pipes with different channel structures.Based on the experimental principle of micro heat pipe and the influence of capillary force on heat transfer ability,we use ANSYS software to do finite element analyzing and study the micro heat pipe with different channel depth and width,different axial structure.The simulation shows that the deeper,wider grooves can improve the heat transfer ability,the bigger width ratio is helpful to strengthen the capillary driving force and promote the reflux of liquid working fluid.Then three kinds of flat micro heat pipes are designed to study the effect of steam chamber height on the heat transfer characteristics of micro heat pipes.Based on above things,the micro heat pipes are fabricated by MEMS machining process and the temperature distribution data of micro heat pipe is collected by this platform.The results show that the best channel filling rate of the plate micro heat pipe is about130%,and the increase of the depth and width of the micro-channel is beneficial to improve the heat transfer efficiency between the working fluid and the outside.The increase of width ratio of the micro-channel provides greater capillary return driving force,so does the heat transfer effect of the plate micro heat pipe.Work temperature difference of flat micro heat pipe with 2mm steam chamber height is small,heat transfer capacity is strong.