| In recent years,micro and nano technology has been rapid development at home and abroad,and played an important role in promoting the social progress.Scanning tunneling microscope(STM)and atomic force microscopy(AFM),and other ultra-high resolution instruments have been widely used in many fields,such as scientific research,industrial production and so on.They have become an important and indispensable tool in nanometer field.In particular,AFM is widely used in micro-nano technology because it is not limited by the conductivity of the sample.Currently,the probe of the majority conventional AFM is a single scanner and has a single scanning mode,only suitable for small-scale sample to achieve high-resolution imaging,and can not achieve a mobile selection area scanning,thus there are insufficient in terms of performance and technical indicators.Therefore,this paper presents a new AFM method based on multi-scanner,and on this basis,develops a set of AFM system based on multi-scanner;the system can achieve a variety of features such as small-scale,large-scale and mobile selection to meet a wider range of needs.In this paper,the AFM system is described in detail from theoretical method,system design and experimental technology.The main research contents and achievements are as follows:A new method of AFM based on multi-scanner is proposed and developed.By combining the advantages of tubular PZT and stack PZT,a novel AFM probe was designed and developed,the system of scanning and feedback control was designed and developed,new AFM software was developed.And on this basis we developed the AFM system based on multi-scanner,get the ideal results.A new type of AFM probe is designed and developed,and a new scanning control method of AFM is proposed.The probe consists of AFM microprobe,test sample,multi-scanner,photoelectric detection unit and other parts.Multi-scanner used the way of combination with tubular PZT and stack PZT to achieve at least four different scanning control of the new method.Including tube PZT scanning feedback mode,stack PZT scanning feedback mode,stack PZT scanning and tubular PZT feedback mode,and mobile selection scanning mode.The method can fully combine the advantages of stack PZT owing large displacement and tube PZT of high precision.By adopting different scanning methods,not only small-scale and high-precision scanning imaging of small sample can be realized,but also the scanning range of several microns to several tens of microns can be achieved,which overcomes the limitation of conventional AFM single scanning method,provides a new way to achieve high precision of micro-nano samples,large-scale,multi-scanner scanning imaging.An AFM system based on multi-scanner was established and AFM scanning experiment was carried out by using this system.The AFM system based on multi-scanner was designed based on multi-scanner AFM probe,scanning control and feedback control circuit,computer hardware interface,multi-scanner control and imaging software.Experimental studies include small-scale high-precision scanning of light and small samples,high-precision scanning of large-scale small-fluctuating structural samples and scanning of large-scale large-fluctuating structural samples,and the mobile selection scanning experiment based on this system is also carried out.The experimental results show that the AFM system based on multi-scanner has stable and good performance.It can realize diversified detection of different samples under different conditions and different requirements.It can fully meet the requirements of different size samples in the terms of the different scan detection range and accuracy requirements. |
