Research On Vibration Suppression Of High Precision Linear Servo System

Linear servo system is a kind of servo system that can be fed directly without intermediate links.It is widely used in the fields of numerical control system,semiconductor manufacturing and precision instrument manufacturing.In recent years,the rapid development of modern science and technology,the performance requirements of the servo system is also more stringent,especially in the industrial production process.Due to the flexible part of the system,the vibration problem has a great impact on the response bandwidth of the servo system and also limits the development of high speed and high precision servo system.A great deal of research has been done on this issue both at home and abroad.Many theoretical achievements have been made,but few practical applications are applied in industrial production.Based on the research of National Natural Science Foundation of China and Provincial Natural Science Foundation of China,the oscillation of flexible system is studied theoretically and practically for the purpose of suppressing the oscillation of the system.Based on the mathematical modeling of the vibration of the linear servo system,the two-degree-of-freedom control strategy of the linear servo system is adopted.The traditional PID controller is used to ensure the stability of the control system.On the basis of the stability of the feedback controller design,the weighting matrix,delay characteristic and The optimal control theory of the iterative learning control algorithm and its application to the linear servo system vibration suppression,while the introduction of iterative optimization and filter operator and other parameters to enhance the robustness of the algorithm and improve the convergence speed adjustment Flexibility,while improving the track servo tracking performance of the linear servo system,the corresponding high-speed operation of the vibration generated a good suppression.At the same time,the linear motion system will always oscillate in the fast positioning because of the existence of the inherent vibration mode,which will affect its positioning speed and accuracy.The generalized iterative learning control algorithm is added on the basis of the stability of the feedback controller design.Based on the general iterative learning control,two window matrices are introduced,and the trajectory tracking target in the whole iterative learning cycle is transformed into the residual after the motion.And the optimal control theory is used to design the iterative learning controller.The residual vibration of the linear servo system iseffectively suppressed,and the tracking accuracy of the linear servo system is improved.Finally,the hardware and software platform of the linear servo system of the project group are introduced,and the above control algorithm is applied to the actual experimental platform to verify the correctness of the control algorithm and the rationality of the controller design.