Thin Film Solar Cell Based On Surface Plasmon Hybrid Nanoforests

With development of solar cells,researchers from different countries have developed a variety of solar cells based on various materials.Low cost and high photoelectric conversion efficiency are the ultimate goals for solar cells,and they are also the keys to broaden solar cell application fields and solve energy shortages.In this thesis,hybrid nanoforests are fabricated first using a plasma repolymerization technique,with help of Si reactive-ion-etching?RIE?,SiO₂ wet etching,and noble metal sputtering.In this way,hybrid nanoforests are obtained.Then a PIN junction amorphous silicon thin film solar cell based on the hybrid nanoforests is proposed and prepared.The solar cell fully utilizes surface plasmon resonance?SPR?of the metal nanoparticles and trapping effect of the silicon nanoforests.Based on the aforementioned features,the photoelectron generation rate of the amorphous silicon thin film solar cell can be greatly improved and higher photoelectric conversion efficiency can be achieved.The research contents of this article are mainly as follows:?1?Preparation of hybrid nanoforests:hybrid nanoforests with effects of surface plasmon resonance and light trapping were prepared by a plasma repolymerization technique,dry etching,wet etching,and metal sputtering.Besides,the controllability of shape,height,and period of the nanoforests and size of the metal nanoparticles is studied.?2?Optical properties of hybrid nanoforests:Firstly,the surface plasmon properties of metal nanoparticles and the light trapping effect of nanoforests were studied from theoretical aspects.Then,the optical properties of the hybrid nanoforests in a band of 200-2500 nm were simulated by using COMSOL Multiphysics software.Based on this,performance of the fabricated nanoforests was tested.Meanwhile,controllability of optical properties of the hybrid nanoforests was also studied.?3?Design and preparation of hybrid nanoforest radial PIN junction amorphous silicon thin-film solar cells:Based on the surface plasmon properties of metallic nanoparticles and the light trapping effect of nanoforests,two different types of radial junction amorphous silicon solar cells based on hybrid nanoforest structures were designed,and the mechanism of high photoelectric conversion efficiency was studied from theoretical aspects.Finally,the related preparation process was investigated.In summary,this thesis designs a radial junction amorphous silicon solar cell based on hybrid nanoforests fabricated using a plasma repolymerization technology,which fully utilizes the surface plasmon properties of metal nanoparticles and the light trapping effect of nanoforests.Besides,the number of photo-carrier is increased greatly,and the minority carrier transport distance is shortened effectively.At the same time,the preparation process is simple and easy to perform.It is expected that mass production of amorphous silicon thin film solar cells with low-cost and high-conversion efficiency is foreseeable.