Design Of Motion Control Interface Of Magnetically Levitated Planar Motor

High-speed,high-precision movement is the base of high-end equipment.Currently,planar motion is widely used,the application of the servo motor is a rotating or linear motor,planar motion is made from the superposition of XY direction motor guide rail.However,the motion performance is limited by its large volume,heavy weight,and mechanical friction.For precise motion,friction is reduced by floating guides,which improve the accuracy of movement.In comparison,the magnetically levitated planar motor(MLPM)mover suspension without contact,the movement of the process without friction and wear,mechanical rails,movement mechanism greatly simplified,significantly reduce the quality of movement,conducive to high-speed,high-acceleration movement,therefore it is an ideal model of the planar motion mechanism.Therefore,the study of magnetically levitated planar actuator has great significance to the development of high precision equipment in our country.In this paper,the design of motion control interface system is carried out for the magnetically levitated planar motor with moving coil.The control principle of the magnetically levitated planar motor and the 6 degree of current decoupling method are introduced.The functional requirements of the motion measurement and control system are analyzed,and the relevant sensors are selected and distributed.In this paper,the function of the measurement and control interface is analyzed,the overall scheme of the interface system is obtained,and the hardware of the interface is designed,including the motor drive interface,the sensor interface,the high speed serial fiber interface and the photoelectric isolated IO.Adopting top-down design method,the interface system is divided into functional modules,and the driver logic is designed by FPGA software.The system test platform is set up to verify the functional modules of the system.The test results show that the motor drive interface and sensor interface have reached the expected conversion accuracy,the fiber transmission data rate is 1.25G/S,FPGA controller meets all kinds of event handling mechanism,measurement and control interface card has reached the design requirements.